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Measures particles in the sub-visible to visible range (5 -300um).

Instant Surface Particle Measurements.

Use the QIII LS to eliminate the particles that cost you time and money.

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Predictable, first time tool recovery, every time.

The industry standard for measuring and controlling surface particle contamination just got better.

  • Increase MTBC by 4x or more.
  • Tool availability Increase by 10%+
  • Reduce PM cycle time.
  • Reduce troubleshooting events.
  • ISO-14644-9 surface particle compliance.

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The shield system you use must create confidence.

Whether protecting your product or your employees, the system must be reliable, and able to handle the most demanding environments. It must also allow the wearer to perform precision movements over long periods of time without becoming uncomfortable.

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QIII MaxSlide thumbnail

Predictable, first time tool recovery, every time.

The industry standard for measuring and controlling surface particle contamination just got better.

  • Increase MTBC by 4x or more.
  • Tool availability Increase by 10%+
  • Reduce PM cycle time.
  • Reduce troubleshooting events.
  • ISO-14644-9 surface particle compliance.

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Pentagon Technologies designs and builds customized units for every type of environment.

We begin by consulting with each client to determine their needs and understand their issues. Our team will create an initial design that meets your environment and airflow management specifications.

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Unmatched clean solutions for all OEM process tools.

Our innovative technologies can redefine productivity. As technology moves the industry into ever-shrinking geometries, and a more competitive environment, we deliver innovations that reduce cost and increase productivity.

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Unmatched clean solutions for all OEM process tools.

Our innovative technologies can redefine productivity. As technology moves the industry into ever-shrinking geometries, and a more competitive environment, we deliver innovations that reduce cost and increase productivity.

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Pentagon Kit Management™ is a comprehensive PM program that integrates cleaning, coatings, repairs, part replacement, shipping, and logistics into a ready-to-install PM Chamber Kit.

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WELCOME TO PENTAGON

Pentagon Technologies multi-division organization offers unparalleled solutions for a wide variety of critical environment customers. We develop innovative products and services that improve the productivity and utilization of semiconductor manufacturing equipment. Since 1998, we have set the industry standard for process chamber and cleanroom operation. Pentagons site services group offers highly skilled professionals for the contamination controlled industry. Our engineers, researchers and technicians provide unmatched products and services for semiconductor, sterile compounding, biotechnology, solar, LED fabs, and many others around the world. Pentagon Technologies has the solution for you, providing excellence and precision every time.

NEWS & EVENTS

Pentagon Technologies introduces QIII LS® for visible and sub-visible surface particle detection.

QIII LS® product enables customers to instantly find the particles on critical surfaces that are costing them time and money.

 

Pentagon introduces innovative eClean® process.

eClean® is an enabling clean technology which greatly improves kit cost of ownership, kit performance, and environmental footprint.

eClean

Clean Air Airborne: Protection & Comfort!

There are many contaminates in the air we breathe that can be hazardous to your health. People who are at risk of exposure, can now isolate themselves from these harmful airborne risks.

 

 

Pentagon Technologies exceeds its 2013 Social, Environmental and Safety goals

I am extremely pleased to announce that Pentagon Technologies exceeded its social, environmental and workplace safety goals for 2013. We accomplished this through strict compliance with environmental regulations at all of our facilities. The Company's operations are reviewed by multiple agencies, which found no exceptions to company standards set well above regulatory thresholds.

Pentagon Technologies exceeds its 2013 Social, Environmental and Safety goals

From a social perspective, we had an outstanding year in 2013 in teaming with our customers to develop new processes and systems to reduce industry dependency on conflict metals. The semiconductor industry is under pressure to reduce its reliance on conflict metals and Pentagon has been recognized as the leader in reducing industry reliance on conflict metals while returning value to our customers.

Pentagon Technologies exceeds its 2013 Social, Environmental and Safety goals

Pentagon achieved its third straight year of exceeding its safety goals with continued results that have had a direct benefit to our employees working throughout our operations. The dedicated efforts of our employees have had a major impact on the operations and goals of Pentagon and its customers.

Pentagon Technologies exceeds its 2013 Social, Environmental and Safety goals

Thanks and congratulations to all of our employees who played such a large part in meeting these extremely important measures.

Carlos Lazalde, CEO