Process Kit Cleaning

Unmatched clean solutions
for all OEM process tools.

Our innovative technologies can redefine productivity. As technology moves the industry into ever-shrinking geometries, and a more competitive environment, we deliver innovations that reduce cost and increase productivity.


Process Kit Cleaning


  • State-of-the-art cleaning & coatings
  • Full kit management
  • Ultra life process kits
  • Assemblies, valves, traps, lid rebuild
  • Spare parts
  • Medical part cleaning


Data and Analysis

  • All process data captured
  • All process data on-line
  • CMM
  • Dimensional analysis lab
  • Graphite Furnace (metals)
  • QIII+ surface particle
  • On-line job tracking

We offer complete service programs for the following fab areas:

  • PVD
  • CVD
  • Etch
  • Diffusion metalware
  • Ion Implant
  • Photo
  • LAM, Novellus, Applied, ASM, & Varian certified


  • 300mm Cu segregated
  • state-of-the-art facilities
  • TX, CA, OR, NY, AZ
  • Al TWAS
  • Ultra TWAS for high stress films
  • Cu TWAS
  • Alumina ceramic
  • Yttria ceramic
  • Yttria Blend ceramic
  • Ultra Yttria ceramic
  • FSE Staff