Predictable, first time tool recovery, every time.

How do you measure cleanliness of the tool after a PM? Pentagon Technologies' QIII® can dramatically reduce PM recovery time, green-to-green time, and increase the overall throughput of the fab.


Redefine Productivity.

How do you measure cleanliness of the tool after a PM? Pentagon Technologies' QIII® can dramatically reduce PM recovery time, green-to-green time, and increase the overall throughput of the fab.


Pentagon Technologies™ line of surface particle detectors is the standard in high technology markets for measuring and controlling surface contamination. Particles that accumulate on your critical surfaces or product can reduce yield and reliability. Particles below 100um in diameter are very difficult to see with the naked eye. These particles settle fast and escape routine air monitoring. The QIII LS Surface Particle Detector measures particles in the sub-visible to visible range (5 -300um).

Use the QIII LS to eliminate the particles that cost you time and money.



Our world wide distributors are ready to help you. Find contact information for the distributor nearest you here.


If your unit needs to be calibrated and/or repaired, please fill out an RMA Request here.