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Process Chamber Services
Our innovative services redefine productivity. As technology moves the industry into ever-shrinking geometries, and a more competitive environment, we deliver innovations that reduce cost and increase productivity.
- Chamber-to-Chamber on-site service programs
- Full kit management
- Ultra life kits
- State-of-the-art cleaning & coatings
- Assembly, valve, and heater rebuild
- Refurbishment of chambers, critical components
- Spare parts