Additional Photos:
Pentagon Kit Management
Pentagon Kit Management™ is a comprehensive PM program that integrates cleaning, coatings, repairs, part replacement, shipping, and logistics into a ready-to-install PM Chamber Kit.
All kits are completely customizable and create PM predictability while improving process stability. Pentagon Kit Management™ will enable you to realize your goals – less cost and more productivity – while allowing you to focus on what you do best.
Benefits of Pentagon Kit Management™:
> Reduced fab labor
> Reduced fab inventory
> Reduced cost-of-ownership
> Increased MTBC
> Improved green-to-green
> Guaranteed kit predictability
> Guaranteed kit inventory
> Guaranteed FFF
> Lean solution
Tools supported:
> 150mm / 200mm / 300mm
> PVD / CVD / Etch
> Most OEMs
Pentagon Ultra Kits:
Taking our kit management program one step further is our series of Ultra Kits. Introduced in 2004, these highly engineered kits extend MTBC by 2x-4x and reduce particles by 1/2 or more. Please contact us for more information.